Title:
マイクロ波エネルギー励起下でのハロシランの製造方法
Document Type and Number:
Japanese Patent JP2005522508
Kind Code:
A
Abstract:
Silanes containing halogen which is bound to silicon are prepared using microwave energy. Silicon is reacted with mixtures of elements or compounds selected from the group consisting of halogen or halogen and organohalogen compounds or halogen and hydrogen or halogen and halogen hydrogen or organohalogen compounds or organohalogen compounds and hydrogen or organohalogen compounds and halogen hydrogen or halogen hydrogen or fluorosilanes and hydrogen, or fluorosilanes and halogen hydrogen or hydrogen containing chlorosilanes and hydrogen or hydrogen containing chlorosilanes and halogen hydrogen or organohalogensilanes and hydrogen or organohalogensilanes and halogen hydrogen or hydro-carbons and halogen hydro-carbons.
Inventors:
Norbert Auner
Application Number:
JP2003584063A
Publication Date:
July 28, 2005
Filing Date:
April 15, 2003
Export Citation:
Assignee:
Wacker-Chemie GmbH
International Classes:
C01B33/107; C07F7/16; (IPC1-7): C07F7/16; C01B33/107
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
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