Title:
コヒーレンス顕微鏡
Document Type and Number:
Japanese Patent JP2006510932
Kind Code:
A
Abstract:
A coherence microscope has a divider ( 3 ) that divides light emitted by a light source ( 1 ) into measurement light, which is supplied to and reflected by a specimen ( 13 ), and reference light. A superimposition device ( 25, 31 ) superimposes the measurement light reflected by the specimen ( 13 ) with the reference light. A short sensor array ( 41 ) detects the light resulting from the superimposition and permits a read-out rate of at least about 60 kHz. The superimposition device has an emission device ( 25, 31 ) for emitting the measurement light and the reference light arranged to effect extensive irradiation of the sensor array ( 41 ) with superimposed light. The ratio of distances covered by the measurement light and the reference light from the emission device ( 25, 31 ) to impingement points on the sensor array ( 41 ) varies in the portion of the sensor array ( 41 ) that is irradiated with superimposed light.
Inventors:
Whiger, Christoph
Hans-Joachim, Meesner
Lutzvin, Monz
Hans-Joachim, Meesner
Lutzvin, Monz
Application Number:
JP2004560435A
Publication Date:
March 30, 2006
Filing Date:
December 16, 2003
Export Citation:
Assignee:
Carl Zeiss AG
International Classes:
G02B21/00; G01B9/02
Foreign References:
| WO1998052021A1 | 1998-11-19 | |||
| US6396587B1 | 2002-05-28 |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori