Title:
微細構造ワークピースを処理する交換可能な湿式処理部分を備えた統合ツール、及び自動化された較正システム
Document Type and Number:
Japanese Patent JP2006527482
Kind Code:
A
Abstract:
An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
Inventors:
Woodruff Daniel Jay
Davis Jeffrey Alan
Mattson David Pee
Egrov Matthew Sea
Harris Randy
Ericsson James Jay
Davis Jeffrey Alan
Mattson David Pee
Egrov Matthew Sea
Harris Randy
Ericsson James Jay
Application Number:
JP2006515199A
Publication Date:
November 30, 2006
Filing Date:
June 04, 2004
Export Citation:
Assignee:
Semitour Incorporated
Harris Randy
Ericsson James Jay
Harris Randy
Ericsson James Jay
International Classes:
H01L21/02; C12N15/31; C23F1/00; H01L21/00; B24B
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato