Title:
プローブテスト構造
Document Type and Number:
Japanese Patent JP2007509343
Kind Code:
A
Abstract:
The substrate has two conductive units (160, 162) supported by the substrate to be interconnected with two respective signal paths of a probe. A conductive unit (164) is supported by the substrate to be interconnected with a ground path of the probe. A last conductive unit is interconnected with a ground path of another probe. A resistive material extends 50 percentage of distance between the unit (164) and the last unit.
Inventors:
Timothy Erescher
Application Number:
JP2006536629A
Publication Date:
April 12, 2007
Filing Date:
September 15, 2004
Export Citation:
Assignee:
CASCADE MICROTECH,INCORPORATED
International Classes:
G01R31/28; G01R27/02; G01R27/04; G01R29/26; G01R31/02; G01R33/12; G01R35/00; H01L23/58; H01L29/80; H01L31/112; H01P1/00; H01P1/16; H01P3/08; G01R1/067; G01R
Domestic Patent References:
| JPH07273509A | 1995-10-20 | |||
| JPH03243871A | 1991-10-30 | |||
| JPH11211766A | 1999-08-06 |
Attorney, Agent or Firm:
Kosaku Sugimura
Shiro Fujitani
Kiyoshi Kuruma
British tribute
Shiro Fujitani
Kiyoshi Kuruma
British tribute