Title:
アクティブ・ウェハプローブ
Document Type and Number:
Japanese Patent JP2007517231
Kind Code:
A
Abstract:
The probe has active circuits (410, 412) with resistive units, each of which is supported by a substrate. Elongate probing units (414, 416) are interconnected to the respective active circuits. The active circuits are interconnected to a substrate by a respective pair of flexible interconnects (432, 434). The active circuits are also interconnected to a respective set of signal paths (420, 422).
Inventors:
Eric Strid
Lead glaison kay
Lead glaison kay
Application Number:
JP2006547348A
Publication Date:
June 28, 2007
Filing Date:
December 21, 2004
Export Citation:
Assignee:
CASCADE MICROTECH,INCORPORATED
International Classes:
G01R1/067; G01R1/073; G01R31/02; G01R31/26; H01L21/66
Domestic Patent References:
| JPS62190738A | 1987-08-20 | |||
| JP2001013167A | 2001-01-19 | |||
| JPH1130631A | 1999-02-02 |
Attorney, Agent or Firm:
Kosaku Sugimura
Shiro Fujitani
Kiyoshi Kuruma
British tribute
Shiro Fujitani
Kiyoshi Kuruma
British tribute