Title:
新規な感光性樹脂組成物
Document Type and Number:
Japanese Patent JP2007525545
Kind Code:
A
Abstract:
New photosensitive PBO precursor polymers which contain diazoquinone moieties attached to its backbone and in which all amino end groups are converted into amide groups. The photosensitive formulation based on the disclosed PBO precursor polymers have good imaging and mechanical properties as well as superior shelf life stability. Photosensitive polybenzoxazole precursor polymers having (sulfon)amide end groups (with or without attached diazoquinone groups) can be formulated into photosensitive compositions with diazoquinone photoactive compounds which lack benzylic hydrogens on the backbone to yield compositions producing films significantly lighter in color after curing.
Inventors:
Ahmad A. Niini
Ilya Raskin
Richard Houpla
Don Larchott
Ilya Raskin
Richard Houpla
Don Larchott
Application Number:
JP2006506990A
Publication Date:
September 06, 2007
Filing Date:
March 09, 2004
Export Citation:
Assignee:
FujiFilm Electronic Materials USA, Inc.
International Classes:
C08G73/22; C08F2/00; C08F36/00; G03F7/022; G03F7/023; G03F7/075; H01L21/027; C08F
Attorney, Agent or Firm:
Chika Takagi
Junji Yuda
Shoji Miwa
Junji Yuda
Shoji Miwa