Title:
誘電体バリヤ放電を用いて基材を被覆するための方法と装置
Document Type and Number:
Japanese Patent JP2007530265
Kind Code:
A
Abstract:
There is described a method and apparatus for coating a substrate with an inorganic-organic hybrid polymer material. The method concerns generating and maintaining a plasma according to the Dielectric Barrier Discharge (DBD) technique, said method comprising the steps of introducing a sample in the space between two electrodes, generating a plasma discharge between the electrodes and admixing aerosols containing hybrid organic/inorganic cross-linked pre-polymers to the plasma discharge. There is also described an apparatus for generating the plasma and admixing the liquid coating material (precursor solution) in the form of aerosol to the plasma discharge.
Inventors:
Rose, claus
Paul Sussen, Sabin Johanna Alouis
Lego, lobby joseph martin
Havelmans, Danny
Cools, yan joseph
Vincenne Guden, Dirk Rio
Paul Sussen, Sabin Johanna Alouis
Lego, lobby joseph martin
Havelmans, Danny
Cools, yan joseph
Vincenne Guden, Dirk Rio
Application Number:
JP2007505342A
Publication Date:
November 01, 2007
Filing Date:
March 30, 2005
Export Citation:
Assignee:
Vrams Instelling Vour Technologish Onderzog (VITO)
Fraunhofer Gesell shaft
Fraunhofer Gesell shaft
International Classes:
B05D3/14; B05D7/24; C09D4/00; C09D5/44; C23C16/30; H05H1/24
Domestic Patent References:
| JPH09110984A | 1997-04-28 | |||
| JP2005522312A | 2005-07-28 | |||
| JPH02103142A | 1990-04-16 | |||
| JPH10219462A | 1998-08-18 | |||
| JPH0649243A | 1994-02-22 |
Foreign References:
| WO2003086029A1 | 2003-10-16 | |||
| WO2004001790A1 | 2003-12-31 | |||
| WO2002028548A2 | 2002-04-11 |
Attorney, Agent or Firm:
Nobuaki Kazehaya
Noriko Asano
Noriko Asano