Title:
インプリント方法に使用する変性された金属製成形型
Document Type and Number:
Japanese Patent JP2008500914
Kind Code:
A
Abstract:
The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain. The anti-adhesive layer is bonded directly onto a surface of the base metal mold. The base metal mold may be e.g. Nickel, and said fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative may be selected front the group consisting of phosphonic acids, phosphinic acids, phosphonates and phosphonate salts, phosphinates and phosphinate salts, or their respective oligomers, such that the phosphorous atom is coupled directly to the alkyl chain, such that the phosphorous atom is coupled directly to the alkyl chain.
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Inventors:
Machias, Kyle
Guerlain, Fresson
Marc, Beck
Bubbly, Hidari
Guerlain, Fresson
Marc, Beck
Bubbly, Hidari
Application Number:
JP2007513944A
Publication Date:
January 17, 2008
Filing Date:
May 27, 2005
Export Citation:
Assignee:
OBDUCAT AB
International Classes:
B29C33/38; B29C59/02; B81C99/00; G03F7/00; H01L21/027
Domestic Patent References:
| JP2006512213A | 2006-04-13 | |||
| JP2005528446A | 2005-09-22 | |||
| JP2002060979A | 2002-02-28 | |||
| JPH04255307A | 1992-09-10 |
Foreign References:
| US20040130441A1 | 2004-07-08 | |||
| WO2004000567A1 | 2003-12-31 | |||
| WO2003102003A1 | 2003-12-11 | |||
| US5277788A | 1994-01-11 |
Attorney, Agent or Firm:
Kenji Yoshitake
Yukitaka Nakamura
Konno Akio
Noritaka Yokota
Mari Asano
Yukitaka Nakamura
Konno Akio
Noritaka Yokota
Mari Asano