Title:
粒状材料を製造するための方法およびシステムならびに粒状材料中の粉塵成分を減少させるためおよび測定するための方法およびシステム
Document Type and Number:
Japanese Patent JP2008503423
Kind Code:
A
Abstract:
The invention is directed to an apparatus for reducing dust in granular polysilicon. The system includes a process vessel having a vacuum port for pulling dust from the polysilicon.
Inventors:
John Di Holder
Hari Prasad Three Halamarcy
John Di Hilker
Hari Prasad Three Halamarcy
John Di Hilker
Application Number:
JP2007516496A
Publication Date:
February 07, 2008
Filing Date:
May 11, 2005
Export Citation:
Assignee:
MEMC ELECTRONIC MATERIALS,INCORPORATED
International Classes:
C01B33/029; C01B33/02; C01B33/027; C30B15/00; C30B21/06; C30B30/04
Domestic Patent References:
| JP2004138253A | 2004-05-13 | |||
| JPH02153814A | 1990-06-13 |
Foreign References:
| US20030077128A1 | 2003-04-24 | |||
| WO2002094714A1 | 2002-11-28 |
Attorney, Agent or Firm:
Samejima Mutsumi
Kyousei Tamura
Kyousei Tamura