Title:
液浸リソグラフィのための動的流体制御システム
Document Type and Number:
Japanese Patent JP2008505485
Kind Code:
A
Abstract:
An apparatus includes a stage that supports a substrate, an optical system having a last optical element, that projects an image onto the substrate that is positioned spaced apart from the last optical element by a gap at least partly filled with an immersion liquid, and a pressure control system having an actuator, that controls pressure of the immersion liquid in the gap using the actuator.
Inventors:
Sogard, Michael
Application Number:
JP2007519212A
Publication Date:
February 21, 2008
Filing Date:
May 18, 2005
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; C07K16/10; G01N33/569; G03F7/20
Domestic Patent References:
| JPH06124873A | 1994-05-06 | |||
| JP2005045223A | 2005-02-17 | |||
| JP2005136404A | 2005-05-26 | |||
| JP2005340815A | 2005-12-08 | |||
| JP2004506290A | 2004-02-26 | |||
| JP2006510146A | 2006-03-23 | |||
| JPS5919912A | 1984-02-01 | |||
| JP2005294846A | 2005-10-20 |
Foreign References:
| WO2004053955A1 | 2004-06-24 | |||
| EP1420302A1 | 2004-05-19 |
Attorney, Agent or Firm:
Kijuro Kawakita