Title:
ガス排出物の大気圧プラズマ処理
Document Type and Number:
Japanese Patent JP2008506516
Kind Code:
A
Abstract:
The invention relates to a method for the conversion of a gas or gas mixture and, in particular, a fluorinated gaseous effluent. According to the invention, at least one bond between two atoms of at least one molecule of the gas or gas mixture is broken under the influence of an electric and/or magnetic field to which the gas or gas mixture is subjected. The gas or gas mixture stream is injected through the electric and/or magnetic field in a non-rectilinear manner in order to increase the distance travelled by the gas molecules through the field and, in this way, increase the effectiveness of the conversion of the gas or gas mixture molecules.
Inventors:
Kabuzi, Yashin
Moisan, Michael
Rostan, Jean-Christophe
Gern, Daniel
Dulphi, Elbe
Moine, Pascal
Laurent, Valur
Depar, Bruno
Moisan, Michael
Rostan, Jean-Christophe
Gern, Daniel
Dulphi, Elbe
Moine, Pascal
Laurent, Valur
Depar, Bruno
Application Number:
JP2007520867A
Publication Date:
March 06, 2008
Filing Date:
July 08, 2005
Export Citation:
Assignee:
Rail Liquide-Societe Anonym Pools Retude e Rex Prosatation de Procede Georges Claude
International Classes:
B01J19/08; B01D53/70; C23C16/44; H01L21/205; H01L21/3065
Domestic Patent References:
| JP2001232180A | 2001-08-28 |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa
Ryo Hashimoto
Tetsuya Kazama
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa
Ryo Hashimoto
Tetsuya Kazama