Title:
間接光電効果を使用して電気要素を試験するための方法
Document Type and Number:
Japanese Patent JP2008529023
Kind Code:
A
Abstract:
A method for testing or measuring electric elements uses at least one electron-discharging electrode, at least one electron-collecting electrode and at least one source of a beam of particles. The method includes ejecting electrons present in the discharging electrode by use of the beam of particles and injecting into an element the electrons supplied by the discharging electrode, and ejecting electrons present in an element by means of the beam of particles and collecting by the collecting electrode the electrons ejected from the element. The ejection of electrons present in the discharging electrode includes the application to the discharging electrode of a reflected beam of particles resulting from the reflection of an incident beam of particles on at least one element.
Inventors:
Christoph Voucher
Jean-Jacques Aubert
Jean-Jacques Aubert
Application Number:
JP2007553641A
Publication Date:
July 31, 2008
Filing Date:
January 24, 2006
Export Citation:
Assignee:
Bearman
International Classes:
G01R31/302; G01R31/308; G01S15/89; G10K11/34
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
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