Title:
多軸真空モータアセンブリ
Document Type and Number:
Japanese Patent JP2008530970
Kind Code:
A
Abstract:
In at least one aspect, a second multi-axis vacuum motor assembly is provided. The second multi-axis vacuum motor assembly includes (1) a first rotor; (2) a first stator adapted to commutate so as to rotate the first rotor across a vacuum barrier and control rotation of a first axis of a robot arm within a vacuum chamber; (3) a second rotor below the first rotor; (4) a second stator below the first stator and adapted to commutate so as to rotate the second rotor across the vacuum barrier and control rotation of a second axis of the robot arm within the vacuum chamber; (5) a first feedback device adapted to monitor rotation of the first axis of the robot arm; and (6) a second feedback device adapted to monitor rotation of the second axis of the robot arm. Numerous other aspects are provided.
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Inventors:
Hudgens Jeffrey Sea
Application Number:
JP2007555273A
Publication Date:
August 07, 2008
Filing Date:
February 11, 2006
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H02K5/10; H01L21/677; H02K7/09; H02K16/00
Domestic Patent References:
| JP2000069741A | 2000-03-03 |
Foreign References:
| US6543306B1 | 2003-04-08 |
Attorney, Agent or Firm:
Yoshiaki Anzai