Title:
薄膜ゲッタ保護
Document Type and Number:
Japanese Patent JP2008532756
Kind Code:
A
Abstract:
A method for installing a sorption element in a cavity including: disposing, within the cavity, a getter material, a reaction material, and a protective material, the protective material covering at least one part of the getter material so as to bury the at least one part; raising a temperature up to at least one removal temperature; and moving the protective material towards the reaction material by reaction between the protective material and the reaction material so that at least one portion of the part of the getter material is no longer covered with the protective material.
Inventors:
Srio Jean-Charles
De revoyer elizabeth
Barrera Francois
Henri David
De revoyer elizabeth
Barrera Francois
Henri David
Application Number:
JP2008501381A
Publication Date:
August 21, 2008
Filing Date:
March 10, 2006
Export Citation:
Assignee:
COMPAGNIE GENERALE DES MATIERES NUCLEAIRES
International Classes:
B01D53/14; B01J20/02; C23C14/06; H01L31/02
Domestic Patent References:
| JP2000243281A | 2000-09-08 |
Attorney, Agent or Firm:
Tamio Nishiwaki