金属(IV)テトラ-アミジネート化合物ならびに蒸着においての使用

Title:

金属(IV)テトラ-アミジネート化合物ならびに蒸着においての使用

Document Type and Number:

Japanese Patent JP2009542654

Kind Code:

A

Abstract:

Metal(IV) tetrakis(N,N'-dialkylamidinates) were synthesized and characterized. Exemplary metals include hafnium, zirconium, tantalum, niobium, tungsten, molybdenum, tin and uranium. These compounds are volatile, highly stable thermally, and suitable for vapor deposition of metals and their oxides, nitrides and other compounds.

More Like This:

JP5555872	Use in a metal (IV) tetra * friend ジネート compound and vapor deposition
JP7075891	Compounds, raw materials for thin film formation, and methods for manufacturing thin films

Inventors:

Gordon, Roy Gee.
Lane, Jean-Sebastian
Lee, fuzzy

Application Number:

JP2009518210A

Publication Date:

December 03, 2009

Filing Date:

June 26, 2007

Export Citation:

Click for automatic bibliography generation Help

Assignee:

President and Fellows of Harvard College

International Classes:

C07C257/14; C07C395/00; C07F5/00; C07F7/00; C07F7/22; C07F9/00; C07F11/00; C23C16/34; C23C16/40; H01L21/316

Domestic Patent References:

JP2006511716A	2006-04-06
JP2006037161A	2006-02-09
JPH05502695A	1993-05-13
JP2006511716A	2006-04-06
JP2006037161A	2006-02-09
JPH05502695A	1993-05-13

Other References:

JPN6012052328; Ｃｈｅｍｉｓｔｒｙ　ｏｆ　ＭａｔｅｒｉａｌｓＶｏｌ．３　Ｎｏ．６, 1991, ｐ．１１３８-１１４８
JPN6012052326; Ｂｕｌｌｅｔｉｎ　ｄｅ　ｌａ　Ｓｏｃｉｅｔｅ　Ｃｈｉｍｉｑｕｅ　ｄｅ　ＦｒａｎｃｅＶｏｌ．１３３，　Ｖｏｌ．７-８, 1996, ｐ．７１１-７２０
JPN6012052326; Ｂｕｌｌｅｔｉｎ　ｄｅ　ｌａ　Ｓｏｃｉｅｔｅ　Ｃｈｉｍｉｑｕｅ　ｄｅ　ＦｒａｎｃｅＶｏｌ．１３３，　Ｖｏｌ．７-８, 1996, ｐ．７１１-７２０
JPN6012052328; Ｃｈｅｍｉｓｔｒｙ　ｏｆ　ＭａｔｅｒｉａｌｓＶｏｌ．３　Ｎｏ．６, 1991, ｐ．１１３８-１１４８

Attorney, Agent or Firm:

Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Atsushi Ebiya
Taiji Matsumoto

Previous Patent: JP2009542653

Next Patent: アルミノケイ酸カルシウム薬