Title:
器具支持構造物
Document Type and Number:
Japanese Patent JP2010515581
Kind Code:
A
Abstract:
An apparatus support structure (11) with a damping characteristic comprises a rigid steel frame resistant to loading in bending and tension, a cladding (16) encapsulating the frame, and an apparatus mounting ring (21). The cladding is formed by a solidified composite casting material which is based on particulate mineral or metallic material, for example, granite, and a synthetic binder, for example epoxy resin, and which has a compliance permitting damping of movement transmitted between the structure and apparatus mounted on the ring (21). The structure can be produced by encasing the frame and ring in a mould constructed in situ around the frame and filing the mould with the cladding material in fluid state.
Inventors:
Paul George Harris
Application Number:
JP2009545220A
Publication Date:
May 13, 2010
Filing Date:
January 08, 2008
Export Citation:
Assignee:
Vistec Lithography Incorporated
International Classes:
B22D19/00; B23Q1/01; H01L21/027
Domestic Patent References:
| JP2004179353A | 2004-06-24 | |||
| JP2004282061A | 2004-10-07 | |||
| JPH11317440A | 1999-11-16 | |||
| JPH08111371A | 1996-04-30 | |||
| JPH06123787A | 1994-05-06 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro