Title:
ガス雰囲気を含むビームガイド内に光音響測定ヘッドを備えるレーザ加工機械
Document Type and Number:
Japanese Patent JP2011524256
Kind Code:
A
Abstract:
A laser processing machine for processing workpieces includes a beam guide containing a gas atmosphere, and also includes an apparatus for investigating the gas atmosphere in the beam guide for impurities. The investigation apparatus makes use of the photoacoustic effect. The measuring apparatus has a measuring chamber and at least one measuring head, where the beam guide acts as the measuring chamber. As a measuring chamber, the beam guide contains the gas atmosphere that is to be investigated and also a modulated laser beam modulated. The measuring head(s) are integrated into the beam guide and are used to detect the photoacoustic effect in the measuring chamber.
Inventors:
Gerhard Hamann
Ulrich Richter
Dirk Phi
Giovanni San Felici
Gunter Creek
Ulrich Richter
Dirk Phi
Giovanni San Felici
Gunter Creek
Application Number:
JP2011513880A
Publication Date:
September 01, 2011
Filing Date:
June 20, 2008
Export Citation:
Assignee:
Trumpf Werkzeugmaschinen GmbH + Co. KG
International Classes:
B23K26/00; B23K26/14; B23K26/03; B23K26/12; B23K26/42; G01N21/17; G01N29/00; G01N29/02
Domestic Patent References:
| JPH05212575A | 1993-08-24 | |||
| JP2008527323A | 2008-07-24 |
Attorney, Agent or Firm:
Takuya Kuno
Toshio Yano
Takahashi
Kimihiro Hoshi
Hiroyasu Ninomiya
Ryoichi Shino
Einzel Felix-Reinhard
Toshio Yano
Takahashi
Kimihiro Hoshi
Hiroyasu Ninomiya
Ryoichi Shino
Einzel Felix-Reinhard