Title:
電流が制御されたアクチュエイタを有する走査プローブ顕微鏡
Document Type and Number:
Japanese Patent JP2012512398
Kind Code:
A
Abstract:
The piezo-electric actuator (1) to oscillate the probe of a scanning probe microscope is arranged in the feedback branch (3) of an analog amplifier (4). A current source (10) is provided for feeding a defined alternating current to the input of the amplifier (4). The amplifier (4) strives to adjust the voltage over the actuator (1) such that the current from the current source (10) flows through the actuator (1). As the current through the actuator (1) is proportional to its deflection, this design allows to run the actuator at constant amplitude without the need of complex feedback loops.
Inventors:
Richen, Jörg
Application Number:
JP2011541053A
Publication Date:
May 31, 2012
Filing Date:
December 17, 2008
Export Citation:
Assignee:
SPECS ZURICH GMBH
International Classes:
G01Q60/32
Domestic Patent References:
| JPH08166396A | 1996-06-25 | |||
| JP2007203199A | 2007-08-16 | |||
| JPH10319024A | 1998-12-04 | |||
| JP2009115550A | 2009-05-28 | |||
| JP2008033567A | 2008-02-14 |
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa