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Title:
基板検査装置
Document Type and Number:
Japanese Patent JP2013517474
Kind Code:
A
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Inventors:
Hong, Yong-kyu
John, Moon-Yang
Kim, Hong-Min
Huh, Jun
Yun, San-kyu
Application Number:
JP2012548899A
Publication Date:
May 16, 2013
Filing Date:
January 18, 2011
Export Citation:
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Assignee:
Co Young Technology Incorporated
International Classes:
G01B11/25; G01N21/956
Domestic Patent References:
JP2002122416A2002-04-26
JPH0666521A1994-03-08
JP2002048523A2002-02-15
JP2001249013A2001-09-14
Attorney, Agent or Firm:
Takahashi Hayashi & Partners



 
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