Title:
静電クランプ、リソグラフィ装置、および静電クランプの製造方法
Document Type and Number:
Japanese Patent JP2014502053
Kind Code:
A
Abstract:
An electrostatic clamp for use in a lithographic apparatus includes burls and an electrode surrounded by an insulator and/or a dielectric material between adjacent burls. In an embodiment, two or more layers of dielectric material are provided between adjacent burls and surround an electrode provided between adjacent burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.
Inventors:
Helms, peter, richard
Matthew Lipson
Will Crow, Ronald, A.
Kennon, James
White, kenard
Reichmann Second, Wilbur, Jordan
Matthew Lipson
Will Crow, Ronald, A.
Kennon, James
White, kenard
Reichmann Second, Wilbur, Jordan
Application Number:
JP2013542421A
Publication Date:
January 23, 2014
Filing Date:
September 21, 2011
Export Citation:
Assignee:
AS ML Holding N.V.
International Classes:
H01L21/027; H01L21/683
Domestic Patent References:
| JP2010161319A | 2010-07-22 | |||
| JPH10273371A | 1998-10-13 | |||
| JP2004022888A | 2004-01-22 | |||
| JP2010522997A | 2010-07-08 | |||
| JP2010258280A | 2010-11-11 | |||
| JPH07142555A | 1995-06-02 |
Foreign References:
| WO2009036995A1 | 2009-03-26 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki