Title:
ツール操作パラメータ及び材料測定と分光情報を関連付けることによるツール性能の改良
Document Type and Number:
Japanese Patent JP2014507801
Kind Code:
A
Abstract:
System(s) and method(s) are provided for adjustment and analysis of performance of a tool through integration of tool operational data and spectroscopic data related to the tool. Such integration results in consolidated data that enable, in part, learning at least one relationship amongst selected portions of the consolidated data. Learning is performed autonomously without human intervention. Adjustment of performance of the tool relies at least in part on a learned relationship and includes generation of process recipe parameter(s) that can adjust a manufacturing process in order to produce a satisfactory tool performance in response to implementation of the manufacturing process. A process recipe parameter can be generated by solving an inverse problem based on the learned relationship. Analysis of performance of the tool can include assessment of synthetic performance scenarios, identification of spectroscopic condition(s) that affect performance, and extraction of endpoints based at least on time dependence spectroscopic data.
Inventors:
Causal, sanjeev
Patel, Skesh Janevhai
Kenji Sugishima
Patel, Skesh Janevhai
Kenji Sugishima
Application Number:
JP2013550545A
Publication Date:
March 27, 2014
Filing Date:
January 17, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/02; G06N20/00; H01L21/3065
Domestic Patent References:
| JP2009534854A | 2009-09-24 | |||
| JP2010525447A | 2010-07-22 | |||
| JP2008537198A | 2008-09-11 | |||
| JP2009534854A | 2009-09-24 | |||
| JP2010525447A | 2010-07-22 | |||
| JP2008537198A | 2008-09-11 |
Attorney, Agent or Firm:
Suzue International Patent Office
Satoshi Kono
Sadao Muramatsu
Shoji Suzue
Kurata Masatoshi
Yoshihiro Fukuhara
Makoto Nakamura
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Satoshi Kono
Sadao Muramatsu
Shoji Suzue
Kurata Masatoshi
Yoshihiro Fukuhara
Makoto Nakamura
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi