Title:
METHOD FOR PRODUCING POLISHING PAD
Document Type and Number:
Japanese Patent JP2018122426
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing a polishing pad which has a base material obtained by curing a resin containing an epoxy resin excellent in polishing efficiency as a main component, or a base material obtained by impregnating and curing a resin containing an epoxy resin in a composition formed of a fiber such as a non-woven fabric, a woven fabric, a mesh, and a bristle.SOLUTION: There is provided a method for producing a polishing pad which has a base material obtained by curing a resin containing an epoxy resin as a main component or a base material obtained by impregnating and curing a resin containing an epoxy resin in a composition formed of a fiber, relatively moves the workpiece along a tool reference surface while supplying a slurry containing a polishing material between the tool reference surface and the workpiece, and polishes the workpiece, where the epoxy resin forming the base material has an epoxy equivalent of 150 to 300, a bisphenol A type or a bisphenol F type main agent containing no reactive diluent is cured with the use of a cation polymerization catalyst such as Lewis acid without using a curing agent, or when the curing agent is used, an amine-based compound having an active hydrogen equivalent (amine equivalent) of 200 to 500 is used.SELECTED DRAWING: None
Inventors:
TANI YASUHIRO
KIRINO CHUJI
NOMURA NOBUYUKI
KIRINO CHUJI
NOMURA NOBUYUKI
Application Number:
JP2017019061A
Publication Date:
August 09, 2018
Filing Date:
February 03, 2017
Export Citation:
Assignee:
RITSUMEIKAN
CRYSTAL KOGAKU KK
KOKONOE DENKI KK
CRYSTAL KOGAKU KK
KOKONOE DENKI KK
International Classes:
B24B37/24; C08G59/06; C08L63/00; C08L75/08; H01L21/304
Domestic Patent References:
| JP2012081565A | 2012-04-26 | |||
| JP2015081306A | 2015-04-27 | |||
| JP2012101298A | 2012-05-31 | |||
| JPH11138420A | 1999-05-25 | |||
| JP2004303983A | 2004-10-28 | |||
| JP2012081566A | 2012-04-26 |
Foreign References:
| WO2016061585A1 | 2016-04-21 |
Attorney, Agent or Firm:
Katsuhiko Hashimoto
Kyoko Hashimoto
Kyoko Hashimoto