Title:
LASER PROCESSING METHOD, LASER PROCESSING APPARATUS, AND MATERIAL MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2018144056
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a laser processing method which enables the formation of a modified part decreased in processing threshold, a reduction in calorific value at a junction interface of membrane during processing, and the prevention of hard card membrane, a laser processing apparatus, and a material manufacturing method.SOLUTION: A laser processing method enables the processing of hard carbon membrane by the laser irradiation of hard carbon membrane formed on a substrate. By irradiation with a modification laser beam with which hard carbon membrane and a laser condensation area are relatively scanned and irradiated at an irradiation energy density, a modified part decreased in processing threshold to a laser beam than to hard carbon membrane before irradiation with the modification laser beam is formed, and, by the irradiation of the modified part of the hard carbon membrane with a processing laser beam with which hard carbon membrane and a laser condensation area are relatively scanned and irradiated, an uneven structure is formed in the modified part.SELECTED DRAWING: Figure 1
Inventors:
KAWAHARA KIMISUKE
SAWADA HIROSHI
SAWADA HIROSHI
Application Number:
JP2017039287A
Publication Date:
September 20, 2018
Filing Date:
March 02, 2017
Export Citation:
Assignee:
CANON MACHINERY INC
International Classes:
B23K26/352
Domestic Patent References:
| JP2016097419A | 2016-05-30 | |||
| JP2006130515A | 2006-05-25 | |||
| JP2003211400A | 2003-07-29 |
Attorney, Agent or Firm:
Kunihiko Shiromura
Tsuyoshi Kumano
Reiko Maeda
Tsuyoshi Kumano
Reiko Maeda