Title:
ELECTRON EMISSION DEVICE
Document Type and Number:
Japanese Patent JP2019061904
Kind Code:
A
Abstract:
To provide a technique capable of cleaning a surface of an electron emission source made of Heusler alloy without adversely affecting emission characteristics of electrons.SOLUTION: An electron emission device 2 includes an electron emission source 4 made of Heusler alloy, an extraction electrode 6, and a heating element 44. In the electron emission device 2, when cleaning a surface of the electron emission source 4, by applying a voltage to the extraction electrode 6 so that the electron emission source 4 has a positive potential, the surface of the electron emission source 4 is cleaned by field evaporation. At this time, in the electron emission device 2, by heating the electron emission source 4 by the heating element 44, an evaporation rate of the field evaporation is sped up, so that the surface of the electron emission source 4 can be cleaned efficiently.SELECTED DRAWING: Figure 24
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Inventors:
ISHIKAWA TAKESHI
SATO TAKESHI
SATO TAKESHI
Application Number:
JP2017186959A
Publication Date:
April 18, 2019
Filing Date:
September 27, 2017
Export Citation:
Assignee:
TOYOTA CENTRAL RES & DEV
International Classes:
H01J37/073; H01J1/304
Attorney, Agent or Firm:
Kaiyu International Patent Office