Title:
HYBRID LIFT PIN
Document Type and Number:
Japanese Patent JP2019169701
Kind Code:
A
Abstract:
To provide a lift pin and a substrate support assembly and a reactor including the lift pin, which prevent formation of hot or cold spots.SOLUTION: A lift pin 100 includes a first section 102 comprising a material having a first transparency, and a second section 104 comprising a material having a second transparency. The lift pin 100 provides improved temperature uniformity across the substrate support assembly including the lift pin during substrate processing.SELECTED DRAWING: Figure 1
Inventors:
UDAY KIRAN ROKKAM
ERIC HILL
ERIC HILL
Application Number:
JP2019009920A
Publication Date:
October 03, 2019
Filing Date:
January 24, 2019
Export Citation:
Assignee:
ASM IP HOLDING BV
International Classes:
H01L21/683; C23C16/458
Domestic Patent References:
| JP2001199791A | 2001-07-24 | |||
| JP2009513027A | 2009-03-26 | |||
| JP2017135147A | 2017-08-03 | |||
| JP2003500827A | 2003-01-07 |
Attorney, Agent or Firm:
Shinjiro Ono
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Shigeo Takeuchi
Yoshiyuki Tamura
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Shigeo Takeuchi
Yoshiyuki Tamura