Title:
SURFACE RESISTANCE MEASUREMENT METHOD AND SURFACE RESISTANCE MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2019194544
Kind Code:
A
Abstract:
To enable measuring a surface resistance on a lower resistance side regardless of a response speed of a charge detection device (surface potentiometer), so that the resistance measurement does not change depending on the size of the object to be measured.SOLUTION: A surface resistance measurement method forms a charging region in a part of an object to be measured, locally forms a local charge elimination region in a part of the object to be measured in a region different from the charging region and detects charge transfer or potential generated by charge transfer from the charging region to the charge elimination region by a non-contact charge detection device. A surface resistance measuring device includes a charging device for forming a charging region in a region of a part of the object to be measured and a charge elimination device that locally forms a charge elimination region in a part of the object to be measured in a region different from the charging region, and the charge detection device capable of detecting the surface potential of the object to be measured, and these devices are placed in non-contact with the object to be measured and can detect a charge transfer or the potential generated by the charge transfer from the charging region to the charge elimination region.SELECTED DRAWING: Figure 1
More Like This:
Inventors:
NUMAYAMA KAZUKI
SUGIMOTO TOSHIYUKI
TAGUCHI KOICHI
TSUKAGOSHI KENJI
SUGIMOTO TOSHIYUKI
TAGUCHI KOICHI
TSUKAGOSHI KENJI
Application Number:
JP2018088604A
Publication Date:
November 07, 2019
Filing Date:
May 02, 2018
Export Citation:
Assignee:
UNIV YAMAGATA
NAPUSON KK
NAPUSON KK
International Classes:
G01R27/02; G01R35/00
Attorney, Agent or Firm:
Masaharu Kobayashi
Masahide Kobayashi
Masahide Kobayashi