Title:
SEMICONDUCTOR STORAGE DEVICE
Document Type and Number:
Japanese Patent JP2019220562
Kind Code:
A
Abstract:
To provide a semiconductor storage device capable of suppressing a positional deviation of a capacitor.SOLUTION: A semiconductor storage device of an embodiment comprises a substrate, a semiconductor memory component, and a capacitor. The substrate includes a first pad and a second pad. The first pad includes a first region and a second region. When a direction from the first pad toward the second pad is a first direction and a direction crossing the first direction is a second direction, a width in the second direction of the first region is wider than that in the second direction of the first electrode of the capacitor, a width in the second direction of the second region is substantially the same as that in the second direction of the first electrode, and a width in the first direction of the first region is narrower than that in the first direction of the first electrode. The first electrode is arranged over at least a part of the first region and at least a part of the second region.SELECTED DRAWING: Figure 5
Inventors:
KUMAGAI KENGO
TANUMA DAIGO
MIZUNO HITOHIRO
TANUMA DAIGO
MIZUNO HITOHIRO
Application Number:
JP2018116469A
Publication Date:
December 26, 2019
Filing Date:
June 19, 2018
Export Citation:
Assignee:
KIOXIA CORP
International Classes:
H05K3/34; H01L23/12; H01L25/00
Domestic Patent References:
| JP2016004986A | 2016-01-12 | |||
| JP2012064720A | 2012-03-29 | |||
| JP2016001717A | 2016-01-07 | |||
| JPH01162277U | 1989-11-10 |
Attorney, Agent or Firm:
Shiga International Patent Office