Title:
CONTROL METHOD OF SURFACE PROPERTY MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2020003436
Kind Code:
A
Abstract:
To provide a control method of a surface property measuring device for preventing displacement of a stylus tip in offsetting.SOLUTION: Relative movement is performed in a Z-axis direction such that a measuring instrument approaches a measurement object surface by a relative movement mechanism, contact of a stylus tip with the measurement object surface is detected, a relative amount of displacement ΔZ0 in the Z-axis direction between the measuring instrument and a measurement object required until a measurement arm becomes horizontal after the stylus tip abuts on the measurement object surface is calculated, an amount of displacement ΔX0 in an X-axis direction generated in the stylus tip when the measuring instrument and the measurement object are moved relatively in the Z-axis direction by the amount of ΔZ0 is calculated, and the measuring instrument and the measurement object are relatively moved by ΔZ0 in the Z-axis direction by the relative movement mechanism so as to make the measurement arm horizontal, and at the same time the measuring instrument and the measurement object are relatively moved by ΔX0 in the X-axis direction by the relative movement mechanism.SELECTED DRAWING: Figure 12
Inventors:
NISHIOKA TAKAYUKI
KATAYAMA MINORU
KATAYAMA MINORU
Application Number:
JP2018125664A
Publication Date:
January 09, 2020
Filing Date:
June 30, 2018
Export Citation:
Assignee:
MITUTOYO CORP
International Classes:
G01B5/20; G01B5/28
Domestic Patent References:
| JPH09229607A | 1997-09-05 | |||
| JP2007198791A | 2007-08-09 | |||
| JP2018025507A | 2018-02-15 |
Attorney, Agent or Firm:
Yoneda Koichiro
Seishiro Suzuki
Seishiro Suzuki