Title:
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING COMPOSITE STRUCTURE, AND DISPLAY MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP2020012192
Kind Code:
A
Abstract:
To provide a ceramic coat excellent in particle resistance; and to provide a method for evaluating particle resistance of the ceramic coat.SOLUTION: A composite structure includes a substrate, and a structure provided on the substrate, and having a surface. The composite structure in which the structure includes a polycrystalline ceramic, and brightness Sa calculated from its TEM image analysis satisfies a prescribed value, can be used suitably as an internal member of semiconductor manufacturing equipment requiring particle resistance.SELECTED DRAWING: None
Inventors:
IWAZAWA JUNICHI
ASHIZAWA HIROAKI
WADA TAKUMA
TAKIZAWA AKIHITO
AOSHIMA TOSHIHIRO
TAKAHASHI YUKI
KANESHIRO ATSUSHI
ASHIZAWA HIROAKI
WADA TAKUMA
TAKIZAWA AKIHITO
AOSHIMA TOSHIHIRO
TAKAHASHI YUKI
KANESHIRO ATSUSHI
Application Number:
JP2019010708A
Publication Date:
January 23, 2020
Filing Date:
January 25, 2019
Export Citation:
Assignee:
TOTO LTD
International Classes:
C23C24/04; C04B41/87; G01N21/27; G01N23/04; G01N23/20; G01N23/203; G01N23/2251; G01N27/62
Domestic Patent References:
| JP2012017527A | 2012-01-26 |
Foreign References:
| WO2017109975A1 | 2017-06-29 |
Attorney, Agent or Firm:
Konno Akio
Minoru Inami
Takeyasu Ito
Yoshino
Keisei Tamura
Minoru Inami
Takeyasu Ito
Yoshino
Keisei Tamura