Title:
PHOTOELECTRIC CONVERSION ELEMENT, MANUFACTURING METHOD THEREOF, PHOTOELECTRIC CONVERSION MODULE, AND ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2020013843
Kind Code:
A
Abstract:
To provide a manufacturing method of a photoelectric conversion element capable of efficiently forming a good texture structure while suppressing a decrease in grinding accuracy, a photoelectric conversion element and a photoelectric conversion module with high grinding accuracy and high photoelectric conversion efficiency, and an electronic device including the photoelectric conversion element.SOLUTION: A manufacturing method of a photoelectric conversion element includes a step of grinding one surface 84W of a semiconductor substrate 800W, a step of forming a protective film 89 on a part of the other surface 85W of the semiconductor substrate 800W, and a step of performing an etching process on the one surface 84W of the semiconductor substrate, and the step of forming the protective film 89 is preferably a step using an inkjet method or a screen printing method.SELECTED DRAWING: Figure 14
Inventors:
KUROKAWA KENICHI
Application Number:
JP2018133997A
Publication Date:
January 23, 2020
Filing Date:
July 17, 2018
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L31/0236
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi