Title:
VACUUM TRANSFER MODULE AND VACUUM TRANSFER METHOD
Document Type and Number:
Japanese Patent JP2020041193
Kind Code:
A
Abstract:
To reduce the oxygen concentration of a vacuum transfer module.SOLUTION: A transfer mechanism is included in a housing having a vacuum atmosphere formed in the inside and including a load lock module and a treatment module for vacuuming a body to be treated respectively connected in a lateral direction from the outside. The transfer mechanism including a rotation body rotating around a rotation shaft having a position fixed in the housing transfers the body to be treated between the load lock module and the treatment module; in order to supply inert gas for purging the inside of the housing, the vacuum transfer module includes a gas supply port opened in the housing and an exhaust port exhausting the inside of the housing to form a vacuum atmosphere; and a positional relationship between the gas supply port and the exhaust port is set so that an angle formed by a first straight line connecting the exhaust port and the rotation shaft and a second straight line connecting the gas supply port and the rotation shaft is 100-260° in a plan view.SELECTED DRAWING: Figure 2
Inventors:
YOKOUCHI KAZUHARU
ISHIBASHI MASAYUKI
ISHIBASHI MASAYUKI
Application Number:
JP2018170162A
Publication Date:
March 19, 2020
Filing Date:
September 12, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
C23C16/44; C23C14/56; H01L21/31; H01L21/677
Domestic Patent References:
| JP2016114389A | 2016-06-23 | |||
| JPH02184333A | 1990-07-18 |
Attorney, Agent or Firm:
Patent Corporation Yayoi Patent Office