Title:
VACUUM GATE VALVE
Document Type and Number:
Japanese Patent JP2020056498
Kind Code:
A
Abstract:
To provide a vacuum gate valve in which friction between a seal material and a seal surface is suppressed compactly with minimum driving force, to enable stable and reliable opening/closing operation even under low particle and high speed driving, impact noise and vibration are limited as much as possible, and further durability is good.SOLUTION: A vacuum gate valve comprises housing bodies arranged oppositely, a valve body opening/closing drive body that is arranged between the housing bodies and performs vertical movement and L-shaped movement, and a stem with a valve body on its top. In each housing body, a piston rod that moves vertically by a cylinder mechanism, and a cam member with a cam groove at its upper end, are provided. On both sides of the valve body opening/closing drive body, a cam roller and a fulcrum roller that are slidably guided in the cam groove, are provided. Inside the housing body, a vertical movement guide part that guides the vertical movement of the fulcrum roller and a stopper part that locks the rising of the valve body opening/closing drive body, are provided. Between the valve body opening/closing drive body and a stationary side base part, a spring that raises the valve body opening/closing drive body to the upper end of an opening stroke, is provided.SELECTED DRAWING: Figure 1
Inventors:
IWABUCHI TOSHIAKI
Application Number:
JP2019147617A
Publication Date:
April 09, 2020
Filing Date:
August 09, 2019
Export Citation:
Assignee:
KITZ SCT:KK
International Classes:
F16K3/18; F16K51/02
Attorney, Agent or Firm:
Tetsuo Kobayashi