Title:
SUBSTRATE WAREHOUSE, SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2020061397
Kind Code:
A
Abstract:
To specify the cause of a defect in semiconductor device manufacture without lowering a production quantity.SOLUTION: The present invention relates to a substrate warehouse that stores containers containing substrates, and that comprises: a carry-in part where a container is mounted when carried in from outside; a carry-out part where the container is mounted when carried out; a stand-by part where the container to be carried out is mounted; a functional part which includes an inspection part performing processing to inspect a substrate; a delivery part where the container is mounted when the substrate is delivered between the functional part and the container; a container carrying mechanism which carries the container inside the substrate warehouse; and a substrate conveying mechanism which conveys the substrate between the functional part and the container mounted on the delivery part.SELECTED DRAWING: Figure 6
Inventors:
MORI TAKUYA
Application Number:
JP2018189707A
Publication Date:
April 16, 2020
Filing Date:
October 05, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/673; B65G1/04; H01L21/677
Domestic Patent References:
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Attorney, Agent or Firm:
Tetsuo Kanamoto
Koji Hagiwara
Naoki Ogita
Koji Hagiwara
Naoki Ogita