Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2020077716
Kind Code:
A
Abstract:
To properly perform the inspection of a rear-surface irradiation type imaging device in a short time, regardless of a state at the time of the inspection of a light irradiation mechanism for irradiating the imaging device with light.SOLUTION: The inspection device is for inspecting a device to be inspected. The device to be inspected formed in a body to be inspected is the rear-surface irradiation type imaging device on which the light is made incident from a rear surface which is a surface on a side opposite to a side on which a wiring layer is provided. The inspection device includes a placing table which has a transparent placing surface on which the body to be inspected is placed, the light irradiation mechanism which is provided on the placing table and irradiates the body to be inspected placed on the placing surface with the light through the placing surface, and an acquisition part which acquires the in-plane distribution of the illuminance of the light from the placing surface.SELECTED DRAWING: Figure 7
Inventors:
AKIYAMA NAOKI
NAKAYAMA HIROYUKI
SAITO SUSUMU
NAKAYAMA HIROYUKI
SAITO SUSUMU
Application Number:
JP2018209201A
Publication Date:
May 21, 2020
Filing Date:
November 06, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/66; H01L27/146
Domestic Patent References:
| JP2009170730A | 2009-07-30 | |||
| JP2016100545A | 2016-05-30 |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine