Title:
RETAINING FILM BODY OF GLASS SUBSTRATE AND POLISHING METHOD OF GLASS SUBSTRATE
Document Type and Number:
Japanese Patent JP2020097094
Kind Code:
A
Abstract:
To provide a retaining film body of a glass substrate capable of providing a glass substrate which has a long life and has high flatness.SOLUTION: A retaining film body of a glass substrate includes a first member which has a first self adsorption type sheet adsorbing and retaining the glass substrate onto a first surface, a first adhesive layer, a first sheet-shaped substrate and a second adhesive layer provided on a second surface of the first self adsorption type sheet, and a second member which has a second self adsorption type sheet adsorbing and retaining the glass substrate onto the first surface, and a third adhesive layer, a second sheet shaped substrate and a fourth adhesive layer which are provided on a second surface of the second self adsorption type sheet. Therein, the first surface of the first self adsorption type sheet and the first surface of the second self adsorption type sheet are connected to each other.SELECTED DRAWING: Figure 6
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Inventors:
KAKIZAKI MIKI
ABE SHIGETO
ABE SHIGETO
Application Number:
JP2019160519A
Publication Date:
June 25, 2020
Filing Date:
September 03, 2019
Export Citation:
Assignee:
AGC INC
International Classes:
B24B37/30; B24B41/06; C03C19/00
Domestic Patent References:
| JP2011212807A | 2011-10-27 |
Foreign References:
| WO2011118010A1 | 2011-09-29 |
Attorney, Agent or Firm:
Patent business corporation glory patent office