Title:
FLAT SURFACE PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2020110902
Kind Code:
A
Abstract:
To provide a flat surface processing device which enables a grind stone to be attached to a spindle safely and easily.SOLUTION: A flat surface processing device 1 includes: a suction holding mechanism which is provided at a spindle flange 26 connected to a spindle 23 and generates a negative pressure between itself and an annular grind stone wheel 21a holding a grind stone 21 to suction and hold the grind stone wheel 21a on the spindle flange 26; and a friction holding mechanism which moves a pressing wheel 61 provided at a lower end of the spindle 23 in a vertical direction V to cause a collet 62 inserted on the pressing wheel 61 to expand its diameter in a radial direction R of the spindle 23 and hold and retain the grind stone wheel 21a with the collet 62.SELECTED DRAWING: Figure 10
Inventors:
MAEDA YUKI
ADACHI TEI
ADACHI TEI
Application Number:
JP2019005595A
Publication Date:
July 27, 2020
Filing Date:
January 16, 2019
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B24B45/00; B24B7/04; B24B41/047; H01L21/304
Domestic Patent References:
| JP2014100772A | 2014-06-05 | |||
| JP2016144842A | 2016-08-12 | |||
| JPS51145073A | 1976-12-13 | |||
| JP2010030011A | 2010-02-12 | |||
| JP2016144839A | 2016-08-12 |
Foreign References:
| US20060121840A1 | 2006-06-08 |
Attorney, Agent or Firm:
Takamitsu Shimizu