RESIN SHEET FOR ADSORBING OBJECT TO SURFACE

Title:

RESIN SHEET FOR ADSORBING OBJECT TO SURFACE

Document Type and Number:

Japanese Patent JP2021057474

Kind Code:

A

Abstract:

To provide a resin sheet which has a low risk of contamination to an object and is excellent in performance of holding the object.SOLUTION: A resin sheet is used for holding an object onto a holding surface plate of a vacuum suction device. The resin sheet is arranged between the holding surface plate and the adsorption object, can adsorb the object to the surface of the resin sheet by a negative pressure, thereby holds the object onto the holding surface plate of a vacuum suction device, the resin sheet contains a photosensitive resin and/or a resin obtained by photocuring the photosensitive resin, the resin sheet has a plurality of through holes having a bore diameter of 10-500 μm in a thickness direction, and the resin sheet has a through hole area ratio that is a ratio of an area of the through holes to the total area of the resin sheet when be viewed from the upper part in the thickness direction of 5-40%.SELECTED DRAWING: Figure 1

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