Title:
SUBSTRATE TRANSPORT DEVICE AND SUBSTRATE PROCESSING SYSTEM
Document Type and Number:
Japanese Patent JP2021086986
Kind Code:
A
Abstract:
To provide a substrate transport device that transports a substrate.SOLUTION: A substrate transfer device includes a planar motor installed in a transport room and having an array of coils, a transport unit that moves on the planar motor, and a control unit that controls the energization of the coils. The transport unit includes two bases that have an array of magnets and move on the planar motor, a substrate support member that supports the substrate, and a link mechanism that connects the two bases and the substrate support member.SELECTED DRAWING: Figure 1
Inventors:
HATANO TATSUO
MIYASHITA TETSUYA
WATANABE NAOKI
SUZUKI NAOYUKI
MIYASHITA TETSUYA
WATANABE NAOKI
SUZUKI NAOYUKI
Application Number:
JP2019217076A
Publication Date:
June 03, 2021
Filing Date:
November 29, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/677; B25J19/00
Domestic Patent References:
| JP2018504784A | 2018-02-15 | |||
| JP2014087257A | 2014-05-12 | |||
| JP2005101319A | 2005-04-14 | |||
| JPH0616239A | 1994-01-25 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito