Title:
METHOD FOR MANUFACTURING LITHIUM TANTALATE SUBSTRATE
Document Type and Number:
Japanese Patent JP2021116194
Kind Code:
A
Abstract:
To provide a method for manufacturing a lithium tantalate (LT) substrate excellent in electrical properties, capable of suppressing the occurrence of irregular color (irregular reduction).SOLUTION: In a method for manufacture a LT substrate obtained by burying a LT crystal treated in a substrate state in the mixed powder of aluminum powder (Al powder) and aluminum oxide powder (Al2O3 powder) charged into a vessel; arranging the vessel in a heating furnace; and heating the LT crystal at a temperature less than the curie temperature of the LT crystal, the LT substrate having a volume resistivity desired by measuring the gas permeability and water vapor gas discharge amount of the applied Al2O3 powder and setting the mixture ratio of the Al powder to the mixed powder is manufactured. Even when manufacturers of the applied Al2O3 powder are different, the LT substrate having the desired volume resistivity can be simply manufactured without previously performing a test for matching the mixture ratio.SELECTED DRAWING: Figure 1
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Inventors:
AOKI KATSUTOSHI
Application Number:
JP2020008772A
Publication Date:
August 10, 2021
Filing Date:
January 22, 2020
Export Citation:
Assignee:
SUMITOMO METAL MINING CO
International Classes:
C30B29/30; C30B15/00; H01L41/187; H03H9/25
Attorney, Agent or Firm:
Akira Ueda
Masahiro Koizumi
Kamei Takeyuki
Masahiro Koizumi
Kamei Takeyuki