Title:
AIR FEED SYSTEM
Document Type and Number:
Japanese Patent JP2021139580
Kind Code:
A
Abstract:
To favorably analyze the presence or absence of a failure of an element for detecting differential pressure between the inside and the outside of an objective chamber.SOLUTION: When a start condition of a failure analysis operation is satisfied, a control part 50 performs a failure analysis operation for detecting second differential pressure with a differential pressure detection sensor 32 while driving an air feed fan 44 at a minimum frequency for a prescribed time after detecting first differential pressure with the differential pressure sensor 32 while driving the air feed fan 44 at a maximum frequency for a prescribed time, and determining whether or not at least either of a first absolute value of a difference between the last differential pressure which is detected by the differential pressure detection sensor 32 immediately before the drive of the air feed fan 44 at the maximum frequency for the prescribed time and the first differential pressure, and a second absolute value of a difference between the first differential pressure and the second differential pressure is equal to a preset set value or larger. In the failure analysis operation, when the number of times of continuous determination in which the first absolute value and the second absolute value become smaller than the set value reaches a preset reference number of times, the control part makes a notification part perform a notification operation.SELECTED DRAWING: Figure 2
Inventors:
MASUGI TAKUYA
Application Number:
JP2020038954A
Publication Date:
September 16, 2021
Filing Date:
March 06, 2020
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD
International Classes:
F24F7/007; F24F11/38; F24F11/52
Attorney, Agent or Firm:
Sakai International Patent Office