Title:
LEAKAGE INSPECTION DEVICE AND LEAKAGE INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2021139679
Kind Code:
A
Abstract:
To provide a leakage inspection device and a leakage inspection method, with which it is possible to inspect the pressure leakage of a plurality of inspection chambers in a short time with good accuracy.SOLUTION: Provided is a leakage inspection device 1 comprising: an inspection mechanism for carrying out a first inspection process of pressurizing a first inspection chamber and a reference chamber interior by a pressurizing gas and inspecting the pressure leakage of the first inspection chamber on the basis of a difference in pressure between the first inspection chamber and the reference chamber interior and a second inspection process of pressurizing a second inspection chamber and the reference chamber interior by a pressurizing gas after the termination of the first inspection process and inspecting the pressure leakage of the second inspection chamber on the basis of a difference in pressure between the second inspection chamber and the reference chamber interior; a first precompression path for precompressing the second inspection chamber interior by a pressurizing gas; a first precompression valve for opening/closing the first precompression path; and a control device for controlling the inspection mechanism and the first precompression valve. The control device opens the first precompression valve and precompresses the second inspection chamber interior while the first inspection process is underway and carries out the second inspection process by the inspection mechanism while the second inspection chamber interior is precompressed.SELECTED DRAWING: Figure 3
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Inventors:
MATSUKAWA TETSUYA
Application Number:
JP2020036023A
Publication Date:
September 16, 2021
Filing Date:
March 03, 2020
Export Citation:
Assignee:
TOYOTA MOTOR CORP
International Classes:
G01M3/26
Domestic Patent References:
| JP3136945U | 2007-11-08 | |||
| JP2008309698A | 2008-12-25 | |||
| JP2005201822A | 2005-07-28 | |||
| JP2000205991A | 2000-07-28 | |||
| JPS59168145U | 1984-11-10 |
Foreign References:
| US4670847A | 1987-06-02 |
Attorney, Agent or Firm:
Shuhei Katayama