Title:
DEVICE AND METHOD FOR INSPECTING ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2021148532
Kind Code:
A
Abstract:
To provide a device and a method for inspecting an electronic device which make it easier to inspect the quality of an electronic element joint unit.SOLUTION: The device for inspecting an electronic device includes: an imaging mechanism for taking an image of a joint unit between an electronic element and a substrate; an oblique illumination for illuminating the joint unit obliquely from an axial direction of the imaging mechanism; and an image processing mechanism for determining the quality of the joint unit on the basis of an obliquely illuminated image taken by the oblique illumination. The image processing mechanism specifies a reflection region in the obliquely illuminated image. On the basis of the reflection region, the presence of a curve in the joint unit is determined, and the quality of the joint unit is determine on the basis of the presence or absence of a curve.SELECTED DRAWING: Figure 1
Inventors:
OSHIMOTO ATSUSHI
Application Number:
JP2020047229A
Publication Date:
September 27, 2021
Filing Date:
March 18, 2020
Export Citation:
Assignee:
NEC CORP
International Classes:
G01N21/956; H01L21/66
Attorney, Agent or Firm:
Masahiko Desk
Naoki Shimosaka
Naoki Shimosaka