Title:
CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2021167039
Kind Code:
A
Abstract:
To provide a cutting device capable of maintaining the capability discharging mist from a processing chamber while suppressing load applied on an operator low.SOLUTION: The cutting device includes: a holding table comprising a holding face for holding a workpiece; a processing unit comprising a spindle to which a grind stone tool is loaded; a processing chamber storing the holding table and processing unit; and a duct unit sucking the mist generating inside the processing chamber to discharge outside that chamber. The duct unit comprises: a flow channel having an inflow port in which the mist inflows from the processing chamber at a lower part, and an outflow port in which the gas separated from the mist outflows; a punching metal provided in the flow channel to block the flow of the mist flowing toward the outflow port from the inflow port, and having a hole penetrating toward a direction heading for a top face; and a liquid supply nozzle for supplying a liquid of the flow rate capable of covering the hole to the top face side of the punching metal.SELECTED DRAWING: Figure 3
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Inventors:
HORI SHINICHIRO
SAKURAI TAKATOSHI
YASUDA TAKEKI
SAKURAI TAKATOSHI
YASUDA TAKEKI
Application Number:
JP2020071114A
Publication Date:
October 21, 2021
Filing Date:
April 10, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23Q11/00; B24B55/06; B24B27/06; H01L21/301
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Ei Okamoto
Takayuki Okano
Tomohiro Okamoto
Kasahara Takahiro
Ei Okamoto
Takayuki Okano