Title:
【発明の名称】縮小露光機の位置決め方法
Document Type and Number:
Japanese Patent JP2502980
Kind Code:
B2
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Inventors:
FUNATSU HIROYUKI
Application Number:
JP16358386A
Publication Date:
May 29, 1996
Filing Date:
July 14, 1986
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L21/68; G03F7/20; G03F9/00; H01L21/027; H01L21/30; (IPC1-7): H01L21/027
Domestic Patent References:
| JP5780724A | ||||
| JP60186845A |
Attorney, Agent or Firm:
Toshiaki Suzuki