Title:
【考案の名称】IC供給装置
Document Type and Number:
Japanese Patent JP2507897
Kind Code:
Y2
Inventors:
Keiichi Fukumoto
Application Number:
JP11768989U
Publication Date:
August 21, 1996
Filing Date:
October 06, 1989
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01R31/26; H01L21/66; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; G01R31/26; H01L21/66
Attorney, Agent or Firm:
Kusano Takashi