Title:
露光装置
Document Type and Number:
Japanese Patent JP2509076
Kind Code:
Y2
Inventors:
Fumio Abe
Application Number:
JP13562488U
Publication Date:
August 28, 1996
Filing Date:
October 18, 1988
Export Citation:
Assignee:
三菱電機株式会社
International Classes:
G03B27/50; G03B27/32; H01J9/227; (IPC1-7): G03B27/32; H01J9/227
Domestic Patent References:
| JPS62281230A |
Attorney, Agent or Firm:
Masuo Oiwa