Title:
【発明の名称】ビ-ム走査型干渉法膜厚測定装置
Document Type and Number:
Japanese Patent JP2510418
Kind Code:
B2
Inventors:
MATSUDA JOJI
KIKUCHI YASUTAKA
NAMIKI MICHIO
KIKUCHI YASUTAKA
NAMIKI MICHIO
Application Number:
JP22752786A
Publication Date:
June 26, 1996
Filing Date:
September 26, 1986
Export Citation:
Assignee:
KOGYO GIJUTSU INCHO
YUNION KOGAKU KK
YUNION KOGAKU KK
International Classes:
G01B11/06; (IPC1-7): G01B11/06
Domestic Patent References:
| JP533363A | ||||
| JP5838808A | ||||
| JP57113308A |
Attorney, Agent or Firm:
Haruo Kawai (2 outside)
Kawai Haruo
Kawai Haruo