Title:
【発明の名称】ウエフア上電子回路検査装置
Document Type and Number:
Japanese Patent JP2514951
Kind Code:
B2
Inventors:
YAMAMOTO YASUSUKE
Application Number:
JP5107587A
Publication Date:
July 10, 1996
Filing Date:
March 05, 1987
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
H01L21/66; G01R31/26; (IPC1-7): H01L21/66; G01R31/26
Domestic Patent References:
| JP5974731U | ||||
| JP5330992B2 | ||||
| JP5124853Y2 |
Attorney, Agent or Firm:
Shoji Tanaka