Title:
【考案の名称】ウエ-ハ洗浄装置のシャッタ-装置
Document Type and Number:
Japanese Patent JP2515777
Kind Code:
Y2
Inventors:
Hideo Kudo
Application Number:
JP6806389U
Publication Date:
October 30, 1996
Filing Date:
June 13, 1989
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
F16K3/18; H01L21/00; H01L21/677; (IPC1-7): F16K3/18
Domestic Patent References:
| JP53139226A |
Attorney, Agent or Firm:
Koichi Tateno