Title:
【発明の名称】エツチング深さ測定方法
Document Type and Number:
Japanese Patent JP2515982
Kind Code:
B2
Inventors:
NOGAMI YUTAKA
Application Number:
JP16034486A
Publication Date:
July 10, 1996
Filing Date:
July 08, 1986
Export Citation:
Assignee:
ANERUBA KK
International Classes:
G01B11/22; (IPC1-7): G01B11/22
Domestic Patent References:
| JP50152762A |
Attorney, Agent or Firm:
Koichi Hotate